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The Center for Micro/Nano Systems and Nanotechnology is led by Professor Shubhra Gangopadhyay in electrical and computer engineering. This center is a multidisciplinary research facility that houses Nano Mems Semiconductor Lab (NMS) with state of art equipment to support research in the field of micro/nano-fabrication and nanotechnology.

The mission of the Nano Mems Semiconductor Lab (NMS) is to serve and facilitate advanced research in processing and developing nanotechnology for academic and industrial users. NMS promotes the commercialization of nanomaterials research to meet the market needs in the commercial and defense sectors. Entrepreneurs, academic researchers, small and large companies can use our facility to turn their innovative ideas into novel product.

NMS lab has 10,000 sq. feet facility housed at the University of Missouri. Top down microfabrication is performed in a class 100 clean room facility. The lab features additional 1100 sq.ft of class 10,000 cleanroom space equipped with various semiconductor processing equipment including metal and dielectric deposition systems, glove box, rapid thermal annealing system, fumehoods for chemical processing and thermal oxidation systems.

Main activities of this center includes thin film process development for different applications, development of nano porous silicon films, functionalization of nanopours silicon films for biomedical application, development of SiCON films with high breakdown strength, diamond like carbon films based high through put cell ,microchip-based shock wave generator etc.

This center  is also working on synthesizing nanostructured materials such as quantum dots, nanoparticles, nanorods, and nanowires for life sciences, energy and defense applications.