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MU Nano Mems Semiconductor Utililization Lab opens to public

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MU Nano Mems Semiconductor Utililization Lab opens to public

A for-fee Nano Mems Semiconductor Utililization Lab located in the University of Missouri’s College of Engineering has opened, offering academic and private industry investigators training and access to instrumentation, as well as contracted nano mems services.

Through the NMS Utilization Lab, users may be trained to operate the equipment they require for their research or projects by staff technicians. A $30 per hour fee will be charged to users who choose to personally operate the equipment, while $75 per hour will be charged for work conducted by the Lab’s technicians. A complete list of available equipment may be found at: www.engineering.missouri.edu/nano.

Located in Engineering Building West on the MU campus, the lab is divided into several sections. There is a class 100 clean room with complete photolithographic equipment; a class 10000 clean room with different process tools including a plasma enhanced chemical vapor deposition, sputter deposition and E-beam deposition; and a class 10000 clean room with that includes such equipment as a glove box, rapid thermal annealing system, wafer dicer and a thermal oxidation system.

Material characterization capabilities include equipment such as an x-ray diffraction system, microRaman spectroscopy, atomic force microscopy, spectroscopic ellipsometry, probe station, UV-Vis spectroscopy, dynamic light scattering system, fluoremeter, TGA/DSC system, pore surface and porosity analyzer, and more.

As the lab continues to expand, new equipment and capabilities will be profiled on the website. A request to use the facility can be made through the website or by emailing muengrnanomems@missouri.edu or hossainma@missouri.edu

The lab has ongoing research projects in nanoparticle synthesis and functionalization, nano sensors and more. To learn more about the research, visit the Gangopadhyay Reasearch Group website at http://grg.missouri.edu.

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